Capacitive micromachined ultrasonic transducers for chemical detection in nitrogen

Author

K. K. Park

Co-author

H. J. Lee, G. G. Yaralioglu, Ö. Oralkan, M. Kupnik, C. F. Quate, B. T. Khuri-Yakub*, T. Braun, H. P. Lang, M. Hegner, C. Gerber, and J. Gimzewski

Journal

Applied Physics Letters Lett.91

Page

094102

Year

2007

File

Capacitive micromachined ultrasonic transducers for chemical detection in nitrogen.pdf (1.1M) 6회 다운로드

Link

https://aip.scitation.org/doi/10.1063/1.2776348 265회 연결