Brain/Bio Medical Microsystems Lab

Publications

Journal

Fabrication of Capacitive Micromachined Ultrasonic Transducers With High-k Insulation Layer Using Silicon Fusion Bonding
Author
S. Bang, C. Oh, S.-M. Lee, S. Kim, T. Lee, S. Nam, J. Jung, and H. J. Lee*
Journal
Journal of Microelectromechanical Systems
Vol
34
Page
65 - 72
Year
2025

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