Capacitive micromachined ultrasonic transducers for chemical detection in nitrogen
K. K. Park,
H. J. Lee, G. G. Yaralioglu, Ö. Oralkan, M. Kupnik, C. F. Quate, B. T. Khuri-Yakub*, T. Braun, H. P. Lang, M. Hegner, C. Gerber, and J. Gimzewski,
Applied Physics Letters Lett.91,
,094102