Capacitive micromachined ultrasonic transducer (CMUT) as a chemical sensor for DMMP detection

K. K. Park, H. Lee, M. Kupnik, Ö. Oralkan, J.-P. Ramseyer, H. P. Langc, M. Hegner, C. Gerber, B. T. Khuri-Yakub*, Sensors and Actuators B: Chemical, 10 (1)

Chemical vapor detection using a capacitive micromachined ultrasonic transducer

H. J. Lee, K. K. Park, M. Kupnik, Ö. Oralkan, and B. T. Khuri-Yakub*, Analytical Chemistry, 83 (24)

Fabrication of capacitive micromachined ultrasonic transducers via local oxidation and direct wafer bonding

K. K. Park, H. Lee, M. Kupnik, and B. T. Khuri-Yakub*, Journal of Microelectromechanical Systems, 20 (2)