Development of Flex-to-Rigid Capacitive Micromachined Ultrasound Transducer (CMUT) with Bending Modulation

Author

Sang-Mok Lee, Taemin Lee, Chaerin Oh, Hyunjoo J Lee

Conference

2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Kyoto, Japan

Date

June 25-29, 2023

Year

2023