A new MEMS neural probe integrated with embedded microfluidic channel for drug delivery and electrode array for recording neural signal

Y. H. Kim, H. J. Lee, D. Kim, Y. K. Kim, E.-S. Yoon, and I.-J. Cho*, Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 17th International, Barcelona, Spain, Jun. 16-20, 2013.