The influence of the acoustic reflector design on the temperature coefficient of frequency for shear and longitudinal mode AlN resonators

Author

J. Munir

Co-author

M. DeMiguel-Ramos, H. J. Lee, M. A. Saeed, and E. Iborra*

Journal

Journal of Microelectromechanical Systems

Vol

26 (69)

Year

2017

File

The influence of the acoustic reflector design on the temperature coefficient of frequency for shear and longitudinal mode AlN resonators.pdf (1.9M) 6회 다운로드

Link

https://ieeexplore.ieee.org/abstract/document/8013681 338회 연결