Brain/Bio Medical Microsystems Lab

Publications

Journal

The influence of the acoustic reflector design on the temperature coefficient of frequency for shear and longitudinal mode AlN resonators
Author
J. Munir
Co-author
M. DeMiguel-Ramos, H. J. Lee, M. A. Saeed, and E. Iborra*
Journal
Journal of Microelectromechanical Systems
Vol
26 (69)
Year
2017
File
The influence of the acoustic reflector design on the temperature coefficient of frequency for shear and longitudinal mode AlN resonators.pdf (1.9M) 5회 다운로드
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