Reliability issue related to dielectric charging in Capacitive Micromachined Ultrasonic Transducers: a review

Author

J. Munir

Co-author

Q. Ain, and H. J. Lee*

Journal

Microelectronics Reliability

Vol

92

Page

155-167

Year

2019

File

Reliability issue related to dielectric charging in Capacitive Micromachined Ultrasonic Transducers a review.pdf (3.2M) 8회 다운로드

Link

https://www.sciencedirect.com/science/article/pii/S0026271418302324 457회 연결