Fabrication of capacitive micromachined ultrasonic transducers via local oxidation and direct wafer bonding

Author

K. K. Park

Co-author

H. Lee, M. Kupnik, and B. T. Khuri-Yakub*

Journal

Journal of Microelectromechanical Systems

Vol

20 (2)

Year

2011

File

Fabrication of capacitive micromachined ultrasonic transducers via local oxidation and direct wafer bonding.pdf (872.8K) 7회 다운로드

Link

https://ieeexplore.ieee.org/abstract/document/5682364 459회 연결