Brain/Bio Medical Microsystems Lab

Publications

Journal

Fabrication of capacitive micromachined ultrasonic transducers via local oxidation and direct wafer bonding
Author
K. K. Park
Co-author
H. Lee, M. Kupnik, and B. T. Khuri-Yakub*
Journal
Journal of Microelectromechanical Systems
Vol
20 (2)
Year
2011
File
Fabrication of capacitive micromachined ultrasonic transducers via local oxidation and direct wafer bonding.pdf (872.8K) 5회 다운로드
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