MEMS neural probe array for multiple-site optical stimulation with low-loss optical waveguide by using thick glass cladding layer

Author

Y. Son, H. J. Lee, D. Kim, Y. K. Kim, E.-S. Yoon, T. G. Kim, and I.-J. Cho*

Conference

Proc. 27th IEEE MEMS Conference, San Francisco, USA, 2014.

Year

2014