A low-noise oscillator based on a multi-membrane CMUT for high sensitivity resonant chemical sensors

Author

H. J. Lee, K. K. Park, P. Cristman, Ö. Oralkan, M. Kupnik, and B. T. Khuri-Yakub*

Conference

Proc. 22th IEEE MEMS Conference, Sorrento, Italy, pp. 761-764

Year

2009