Functionalization layers for CO2 sensing using capacitive micromachined ultrasonic transducers

H. J. Lee, K. K. Park, M. Kupnik, N. Melosh, and B. T. Khuri-Yakub*, Sensors and Actuators B: Chemical, 174

Mesoporous thin-film on highly-sensitive resonant chemical sensor for relative humidity and CO2 detection

H. J. Lee, K. K. Park, M. Kupnik, N. Melosh, and B. T. Khuri-Yakub*, Analytical Chemistry, 84 (7)

Capacitive micromachined ultrasonic transducer (CMUT) as a chemical sensor for DMMP detection

K. K. Park, H. Lee, M. Kupnik, Ö. Oralkan, J.-P. Ramseyer, H. P. Langc, M. Hegner, C. Gerber, B. T. Khuri-Yakub*, Sensors and Actuators B: Chemical, 10 (1)

Chemical vapor detection using a capacitive micromachined ultrasonic transducer

H. J. Lee, K. K. Park, M. Kupnik, Ö. Oralkan, and B. T. Khuri-Yakub*, Analytical Chemistry, 83 (24)

Fabrication of capacitive micromachined ultrasonic transducers via local oxidation and direct wafer bonding

K. K. Park, H. Lee, M. Kupnik, and B. T. Khuri-Yakub*, Journal of Microelectromechanical Systems, 20 (2)

An integrated circuit with transmit beamforming flip-chip bonded to a 2-D CMUT array for 3-D ultrasound imaging

I. O. Wygant, N. S. Jamal, H. J. Lee, A. Nikoozadeh, Ö. Oralkan, M. Karaman, and B. T. Khuri-Yakub*, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 56 (10)

Capacitive micromachined ultrasonic transducers for chemical detection in nitrogen

K. K. Park, H. J. Lee, G. G. Yaralioglu, Ö. Oralkan, M. Kupnik, C. F. Quate, B. T. Khuri-Yakub*, T. Braun, H. P. Lang, M. Hegner, C. Gerber, and J. Gimzewski, Applied Physics Letters Lett.91, ,094102